[Scan]
initial_time=2016-02-18T00:28:57
final_time=2016-02-18T00:29:16
ip_count=19
run=1032
dataset=13
scan=726
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08785E-4
ql1_vset=
ql1_vmon=-8.18753E-1
ql1_imon=1.41257E-8
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=1.87161E-9
ql3_vset=
ql3_vmon=-9.13084E0
ql3_imon=1.99528E-9
ql4_vset=
ql4_vmon=-9.1423E0
ql4_imon=2.67076E-10
mult1=-1.03269E-8
mult2=-2.59979E-9
rf_tmon=-3.80749E-3
rf_agc=3.2495E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=1.55207E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6609E0
bslens_imon=2.59635E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20054E1
lens5a_imon=1.98757E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.05139E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53934E1
cs_ef1b_imon=3.05654E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02128E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04882E1
cs_ea1_imon=2.20985E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40441E0
lens1_imon=2.65652E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.97105E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03737E1
cs_ea2_imon=1.55258E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84383E1
cs_ef1a_imon=2.9992E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.70938E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11106E1
os_restr1_imon=4.28713E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15193E1
os_ea1_imon=2.17269E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63601E1
os_ef1bup_imon=3.0906E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25623E0
cs_ionrep_imon=1.27438E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.93406E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02041E1
cs_anode1_imon=3.26992E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=3.67308E-8
tplens_vset=1.4E-1
tplens_vmon=1.59365E0
tplens_imon=-1.0068E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26478E1
iondef3_imon=1.49418E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26673E1
iondef2_imon=1.59328E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98459E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=4.02594E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27628E0
ionrepsh_imon=2.01129E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33563E1
lens5b_imon=2.15747E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74536E1
cs_ef2b_imon=3.11597E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.82135E0
os_ea2_imon=-6.17434E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.0069E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71078E1
cs_ef2a_imon=3.17922E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.1119E0
os_ef2alow_imon=-2.65451E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.80637E-1
os_ef2bup_imon=-5.42429E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11031E1
os_restr2_imon=3.52501E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.32123E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01717E1
cs_anode2_imon=2.2694E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72791E1
iondef1_imon=1.07724E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67937E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.0885E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.83E-1
olens1_imon=9.74029E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13304E0
cs_ionaccel_imon=-1.81698E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56307E1
einzel_imon=7.63919E-6
window_vset=0.0E0
window_vmon=1.52814E-1
window_imon=-1.01419E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8261E2
mask1_imon=2.39098E-4
mask2_vset=0.0E0
mask2_vmon=-1.86031E1
mask2_imon=-7.57025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92671E3
multa_neg_imon=7.59399E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.70914E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.15865E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45871E0
defgridb_imon=5.98356E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33337E1
os_fil1_imon=9.573E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0697E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62558E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30852E1
cs_fil1_imon=1.00538E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62244E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64035E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.7494E-2
os_fil2_imon=-2.62864E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96448E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.7443E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33772E-1
cs_fil2_imon=-2.75027E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01458E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22263E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=1.98592E-1
chamber_ion_pmon=1.69875E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.82578E-1
res40_imon=-2.66841E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	9.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.18801E-1	-7.98774E-1	-9.13067E0	-9.14235E0	5.48363E-3	9.30071E-2	2.73027E1	-3.26756E1	-3.26467E1	2.68076E1	1.69725E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.9951E-1
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09634E0	-8.18944E-1	-7.98702E-1	-9.13084E0	-9.1424E0	5.81741E-3	9.29117E-2	2.73173E1	-3.26952E1	-3.26695E1	2.67956E1	1.69653E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.9951E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.18872E-1	-7.98702E-1	-9.13084E0	-9.14197E0	5.53131E-3	9.30071E-2	2.73051E1	-3.27009E1	-3.26036E1	2.68016E1	1.69806E-7	2.51359E-3	2.51359E-3	6.32978E-3	1.98872E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.19111E-1	-7.98488E-1	-9.13033E0	-9.14209E0	5.50747E-3	9.30548E-2	2.73381E1	-3.2649E1	-3.26266E1	2.68123E1	1.69581E-7	2.52061E-3	2.52061E-3	6.33436E-3	1.99E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.19159E-1	-7.98821E-1	-9.13081E0	-9.14207E0	5.62668E-3	9.32217E-2	2.73009E1	-3.26855E1	-3.26266E1	2.68002E1	1.6987E-7	2.52599E-3	2.52599E-3	6.31278E-3	1.99E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.19206E-1	-7.98559E-1	-9.13093E0	-9.14226E0	6.10352E-3	9.32217E-2	2.73213E1	-3.26506E1	-3.26284E1	2.68035E1	1.69654E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.99283E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.19016E-1	-7.98535E-1	-9.13093E0	-9.14204E0	5.88894E-3	9.33409E-2	2.72986E1	-3.26738E1	-3.26236E1	2.67986E1	1.69507E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.99977E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.18801E-1	-7.98559E-1	-9.13098E0	-9.14207E0	5.76973E-3	9.30548E-2	2.72955E1	-3.26663E1	-3.26164E1	2.6795E1	1.69802E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.00325E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.18872E-1	-7.98512E-1	-9.13072E0	-9.1419E0	5.50747E-3	9.30309E-2	2.73139E1	-3.26402E1	-3.26425E1	2.68004E1	1.69798E-7	2.52169E-3	2.52169E-3	6.29665E-3	2.00192E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.18753E-1	-7.98488E-1	-9.13086E0	-9.14221E0	5.57899E-3	9.32217E-2	2.72889E1	-3.26765E1	-3.26488E1	2.68028E1	1.69875E-7	2.52209E-3	2.52209E-3	6.29645E-3	1.98937E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.18944E-1	-7.98631E-1	-9.13057E0	-9.14192E0	5.65052E-3	9.30309E-2	2.72941E1	-3.26793E1	-3.26223E1	2.68058E1	1.69728E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.98937E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.18968E-1	-7.98821E-1	-9.13081E0	-9.14199E0	5.6982E-3	9.32217E-2	2.73153E1	-3.26741E1	-3.25972E1	2.68106E1	1.69654E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.9911E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.19016E-1	-7.98845E-1	-9.13069E0	-9.14207E0	5.38826E-3	9.3317E-2	2.73135E1	-3.26951E1	-3.2602E1	2.68124E1	1.69728E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.00847E-1
1.7E1	2.7E1	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.18992E-1	-7.98702E-1	-9.1306E0	-9.14183E0	5.48363E-3	9.32455E-2	2.73257E1	-3.26767E1	-3.26071E1	2.67885E1	1.69654E-7	2.51552E-3	2.51552E-3	6.29098E-3	2.00673E-1
1.8E1	1.1E2	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.19254E-1	-7.9875E-1	-9.13072E0	-9.14176E0	5.55515E-3	9.30786E-2	2.73472E1	-3.26957E1	-3.26362E1	2.6837E1	1.69653E-7	2.51417E-3	2.51417E-3	6.32896E-3	1.9968E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.18849E-1	-7.98869E-1	-9.13081E0	-9.14202E0	5.48363E-3	9.31263E-2	2.73189E1	-3.26885E1	-3.26404E1	2.67901E1	1.69654E-7	2.52209E-3	2.52209E-3	6.30192E-3	1.99456E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.18896E-1	-7.9875E-1	-9.13036E0	-9.14192E0	5.26905E-3	9.32932E-2	2.73309E1	-3.26819E1	-3.26446E1	2.68267E1	1.70031E-7	2.51248E-3	2.51248E-3	6.32418E-3	1.99577E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.18801E-1	-7.98535E-1	-9.13069E0	-9.1423E0	5.50747E-3	9.33409E-2	2.72738E1	-3.26868E1	-3.2629E1	2.6792E1	1.69725E-7	2.51954E-3	2.51954E-3	6.33436E-3	1.9934E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.18872E-1	-7.9875E-1	-9.13062E0	-9.14245E0	5.36442E-3	9.33886E-2	2.73285E1	-3.26741E1	-3.26302E1	2.68262E1	1.7016E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.9968E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.18753E-1	-7.98535E-1	-9.13084E0	-9.1423E0	5.67436E-3	9.3317E-2	2.72791E1	-3.26673E1	-3.26478E1	2.67937E1	1.69875E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.98592E-1